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Haohai Metal Meterials Co., Ltd.

Adress:

Plant No.19, TusPark, Century Avenue, 

Xianyang City, Shaanxi Pro., 712000, China


Tel:  

+86 29 3358 2330 

+86 29 3358 2349


Fax: 

+86 29 3315 9049


E-mail: 

info@pvdtarget.com

sales@pvdtarget.com



Service Hotline
029 3358 2330

TiAl Sputtering Target, High Quality, Monolithic, Rotatable, Cylindrical, Straight, Dogbone, Planar, Cathodic ARC, PVD Coating, Thin Film Deposition, Magnetron TiAl Sputtering Targets Manufacturer and Supplier

Haohai titanium aluminum (TiAl) sputtering targets and cathodes can provide you an outstanding oxidation-resistant nitride coating (TiAlN) which will well protect your drills, milling machines, index-able cutting inserts and all kind of other cutting tools against wear and therefore extends their service life.

Product Details

TiAl Sputtering Target, High Quality, Monolithic, Rotatable, Cylindrical, Straight, Dogbone, Planar, Cathodic ARC, PVD Coating, Thin Film Deposition, Magnetron TiAl Sputtering Targets Manufacturer and Supplier


TITANIUM ALUMINUM (TiAl) SPUTTERING TARGET


Titanium Aluminum Nitride (TiAlN) coating is recommended for applications where heat resistance and extreme hardness is required for abrasive materials. It is a high-performance coating which excels in abrasive and difficult-to-machine materials such as cast iron, aluminum alloys, tool steels, and nickel alloys.

 

Haohai titanium aluminum (TiAl) sputtering targets and cathodes can provide you an outstanding oxidation-resistant nitride coating (TiAlN) which will well protect your drills, milling machines, index-able cutting inserts and all kind of other cutting tools against wear and therefore extends their service life.


Haohai Titanium Aluminum(TiAl) Sputtering Targets include titanium aluminum(TiAl) rotary sputtering targets, titanium aluminum(TiAl) planar sputtering targets and titanium aluminum(TiAl) cathodic targets.




Titanium Aluminum Rotatable (Rotary, Cylindrical) Sputtering Target


Manufacturing Range

OD (mm)

ID (mm)

Length (mm)

Custom Made

80 - 160

60 - 125

100 - 4000

 

Specification

Composition [at%]

25/75, 30/70, 33/67, 40/60, 50/50

60/40, 67/33, 70/30, 75/25, 80/20

Purity

99.7%

Density

3.1 - 4.0 g/cm3

Grain Sizes

< 100 micron or on request

Fabrication Processes

HIP, Plasma Spraying, Machining, Bonding

Shape

Straight, Dog bone

End Types

SCI, SRF, DSF, RFF, WFF, VA, GPI Ends Fixation, Spiral Groove, 

Custom Made for SS Backing Tube

Surface

Ra 1.6 micron


Other Specification

 Vapor degreased and demagnetized after final machining.

 ID to be HONED and OD GROUND after raw tube is produced to ensure ID to OD concentricity meets drawing requirements.

 High vacuum tight, leak rate at any location not to exceed 1 x 10-8 STD CC/SEC.

 Sealed in plastic, wrapped in foam to protect, and ends capped to protect seal surfaces.

  


  

Titanium Aluminum Planar (rectangle, circular) Sputtering Target


Manufacturing Range

Rectangle

Length (mm)

Width (mm)

Thickness (mm)

Custom Made

10 - 2000

10 - 400

5.0 - 40

Circular

Diameter (mm)


Thickness (mm)

5.0   - 500


5.0   - 40


Specification

Composition [at%]

25/75, 30/70, 33/67, 40/60, 50/50

60/40, 67/33, 70/30, 75/25, 80/20

Purity

99.7%

Density

3.1 - 4.0 g/cm3

Grain Sizes

< 100 micron or on request

Fabrication Processes

HIP, Machining, Bonding

Shape

Monolithic, Multi-segmented Target, Bonding

Types

Plate, Disc, Step, Down bolting, Threading, Custom Made

Surface

Ra 1.6 micron

 

Other Specifications

Flatness, clean smooth surface, polished, free of crack, oil, dot, etc.

Excellent conductions, small linear expansion coefficient and good heat-resistance.

 



Titanium Aluminum arc cathodes

We supply rotary and planar arc cathodes as well as rotary and planar sputtering targets

 



  

For our Titanium Aluminum Sputtering Targets and arc cathodes

 

Tolerance

Acc. to drawings or on request.

 

Haohai provides Titanium Aluminum Sputtering Targets and arc cathodes continually and improves the following material and coating properties:

 Fine grain size and homogeneous microstructure

 High Ductility

 Outstanding material hardness

 Excellent resistance to oxidation

 Coefficient of friction

 Temperature resistance

 Thermal conductivity

 High electrical conductivity

 Color effects

 Antibacterial properties

 

Impurities Content [wt%]

Titanium/aluminum Content [at%]            


30/70

33/67

50/50

60/40

70/30

Purity [%]


99.7

99.7

99.7

99.7

99.7

Metallic Impurities [μg/g]

Ti

32.77

46.30

63.7

72.49

78.15

Al

67.20

53.20

35.9

27.13

20.98

Cu

0.002

0.002

0.002

0.002

0.002

Mn

0.01

0.008

0.004

0.004

0.004

Mg

0.03

0.03

0.03

0.03

0.03

Fe

0.12

0.12

0.085

0085

0.085

Si

0.06

0.06

0.075

0.075

0.061

Non-Metallic Impurities [μg/g]

O

0.09

0.09

0.09

0.09

0.09

N

0.003

0.003

0.003

0.003

0.002

C

0.015

0.015

0.015

0.015

0.015

Cl

0.013

0.013

0.013

0.013

0.013

Guaranteed Density [g/cm3]


3.24

3.260

3.61

3.79

3.99

Grain Size [μm]


100

100

100

100

100

Thermal Conductivity [W/(m·K)]


110

102

61

48

41

Coefficient of Thermal Expansion [1/K]


20·10-6

18·10-6

16·10-6

15·10-6

14·10-6

 

Application

 Wear Resistant Coating

 Decorative Coating




Haohai Metal (Haohai Titanium), equipped with professional factory, is one of the leading manufacturers and suppliers for various materials and sizes of sputtering targets. Our TiAl sputtering target, with high purity, include bonding or spayed (straight or dogbone) rotatable (rotary, cylindrical) targets, planar (rectangle, disc) targets, which are extensiely used in pvd coating for thin film deposition technology. Welcome to buy and wholesale our low price, high usage rates, high purity and high quality TiAl targets.

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